Direct Writing of Graphene/Polydimethylsiloxane Bimorph Thermal Microactuator Via Two-Photon Polymerization and Laser-Induced Graphitization

Author:

Yamashita Yu,Tanaka Yasuko,Tianzhou Chen,Taguchi Yoshihiro,Hashimoto Masaaki

Publisher

Elsevier BV

Reference37 articles.

1. Additive manufacturing method of electrothermal 4D bimorph microactuator;M Hashimoto;Sens. Actuators A,2023

2. A large vertical displacement electrothermal bimorph microactuator with very small lateral shift;L Wu;Sens. Actuators A,2008

3. MEMS-based 3D confocal scanning microendoscope using MEMS scanners for both lateral and axial scan;L Liu;Sens. Actuators A Phys,2014

4. A millimeter-tunable-range microlens for endoscopic biomedical imaging applications;L Wu;I.E.E.E. J. Quantum Electron,2010

5. Fabrication of robust electrothermal MEMS devices using aluminum-tungsten bimorphs and polyimide thermal isolation;S Pal;J. Micromech. Microeng,2012

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