A large vertical displacement electrothermal bimorph microactuator with very small lateral shift

Author:

Wu Lei,Xie Huikai

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference19 articles.

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3. Design and fabrication of 10×10 micro-spatial light modulator array for phase and amplitude modulation;Chung;Sens. Actuators A,1999

4. High-resolution, high-speed microscanner in single-crystalline silicon actuated by self-aligned dual mode vertical electrostatic combdrive with capability for phased array operation;Lee,2003

5. Optical coherence tomography and microscopy in gastrointestinal tissues;Izatt;IEEE J. Sel. Topics Quantum Electron.,1996

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