Experimental Study of Laser Interferometry Based Motion Tracking of a Flexure-Based Mechanism

Abstract

This paper presents an experimental study of laser interferometry-based closed-loop motion tracking for flexure-based four-bar micro/nano manipulator. To enhance the accuracy of micro/nano manipulation, laser interferometry-based motion tracking control is established with experimental facility. The authors present and discuss open-loop control, model-based closed-loop control, and robust motion tracking closed-loop control for flexure-based mechanism. A comparative error analysis for closed-loop control with capacitive position sensor and laser interferometry feedback is discussed and presented. Model-based closed-loop control shows improvement in position and motion tracking over open-loop control. Robust control demonstrates high precise and accurate motion tracking of flexure-based mechanism compared to the model-based control. With this experimental study, this paper offers evidence that the laser interferometry-based closed-loop control can minimize positioning and tracking errors during dynamic motion, hence realizing high precision motion tracking and accurate position control.