SF6 Pyrolysis Decomposition in N2 or O2 Bath Gas and the Influence of H2O Addition
Author:
Affiliation:
1. 1 Environment and Life Engineering, Toyohashi University of Techonology
2. Ecological Engineering, Toyohashi University of Techonology
Publisher
Society of Chemical Engineers, Japan
Subject
General Chemical Engineering,General Chemistry
Link
http://www.jstage.jst.go.jp/article/kakoronbunshu/35/4/35_4_411/_pdf
Reference11 articles.
1. Shock‐Tube Studies of Sulfur Hexafluoride
2. Effect of the percentage of SF6(100 –10 –5 ) on the decomposition of SF6–N2mixtures under negative dc coronas in the presence of water vapour or oxygen
3. Cluster Size Determination in the Chemical Vapor Deposition of Aluminum Nitride
4. Kinetics of complex molecules in aerodynamic flows.
5. Study of Characterization of SF6 Pyrolysis Reaction Using Tube Reactor
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