Effects of UV-irradiation on Removal Process of Photoresist by Aqueous Ozone

Author:

Abe Yutaka1,Kaneko Akiko1,Yagi Takahiro1,Hamada Hiroyuki1,Ike Masatoshi2,Asano Toshiyuki3,Kato Takeshi3,Fujimori Ken4

Affiliation:

1. Graduate School of System and Information Engineering, University of Tsukuba

2. Tsukuba Semi Technology Inc.

3. Ibaraki Prefectural Industrial Technology Institute

4. Tsukuba Industrial Liaison and Cooperative Research Center

Publisher

Society of Chemical Engineers, Japan

Subject

General Chemical Engineering,General Chemistry

Reference24 articles.

1. Abe, Y., Fujimori, K. and Ike, M.; “Equipment of Photoresist Stripping” (in Japanese), Japanese Patent Disclosure 2008-311256 (2008a)

2. Abe, Y., Fujimori, K. and Ike, M.; “Method of Photoresist Stripping” (in Japanese), Japanese Patent Disclosure 2008-311257 (2008b)

3. The pH dependence of the ozone absorption kinetics in aqueous phenol solutions

4. Bailey, P. S.; Ozonation in Organic Chemistry, Academic Press, New York, USA (1978)

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