Decomposition Mechanism of SF6 by Long DC Arc Plasma
Author:
Affiliation:
1. Department of Chemical Engineering, Kyushu University
Publisher
Society of Chemical Engineers, Japan
Subject
General Chemical Engineering,General Chemistry
Link
https://www.jstage.jst.go.jp/article/kakoronbunshu/47/6/47_21wh016/_pdf
Reference14 articles.
1. Carkner, A., L. Rao, A. Kaldas, P. Carabin and A. Ross; “Destruction of Ozone Depleting Substances Using Steam Plasma,” Proc. Int. Conf. Thermal Treat. Technol. Hazardous Waste, 19, 1–9 (2012)
2. Chen, S., O. Zivny, A. Maslani and S. Chau; “Abatement of Fluorinated Compounds in Thermal Plasma Flow,” J. Fluor. Chem., 217, 41–49 (2019)
3. Choi, S., T. Li, T. Watanabe, T. Nakayama and K. Otsuki; “Numerical Analysis of Temperature Distribution in the Long DC Arc Thermal Plasma for Waste Treatment,” J. Chem. Eng. Japan, 46, 201–208 (2013)
4. Hong, Y. C., H. S. Uhm, B. J. Chun, S. K. Lee, S. K. Hwang and D. S. Kim; “Microwave Plasma Torch Abatement of NF3 and SF6,” Phys. Plasmas, 13, 033508 (2006)
5. Li, T., T. Watanabe, T. Ochi and K. Otsuki; “Liquid Waste Decomposition by Long DC Arc Under Atmospheric Pressure,” Chem. Eng. J., 231, 155–162 (2013)
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