Low temperature CMUT fabrication process with dielectric lift-off membrane support for improved reliability-Reference-Cited by-同舟云学术

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Low temperature CMUT fabrication process with dielectric lift-off membrane support for improved reliability

Published:2018-05-08 Issue:8 Volume:28 Page:085006
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Pirouz Amirabbas^ORCID,Degertekin F Levent

Funder

National Heart, Lung, and Blood Institute

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://iopscience.iop.org/article/10.1088/1361-6439/aabe0c/pdf

Reference28 articles.

1. Front-end receiver electronics for high-frequency monolithic CMUT-on-CMOS imaging arrays

2. Thermal-mechanical-noise-based CMUT characterization and sensing

3. CMUT-in-CMOS ultrasonic transducer arrays with on-chip electronics

4. Single-chip CMUT-on-CMOS front-end system for real-time volumetric IVUS and ICE imaging

5. Low temperature process for CMUT fabrication with wafer bonding technique

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High-Performance Electrode-Post CMUTs: Fabrication Details and Best Practices;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2023-10

2. Outperforming piezoelectric ultrasonics with high-reliability single-membrane CMUT array elements;Microsystems & Nanoengineering;2022-06-02

3. Assessing the Microfabrication-Related Variability of the Performance of CMUT Arrays;IEEE Open Journal of Ultrasonics, Ferroelectrics, and Frequency Control;2022

4. Passive Vibration Control and Tunable Damping of MEMS Resonators via Electrical Autoparametric Resonance;Journal of Microelectromechanical Systems;2021-12

5. Analysis of Negative Capacitance-Based Broadband Impedance Matching for CMUTs;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2021-09

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