Numerical modeling and validation of squeezed-film damping in vacuum-packaged industrial MEMS-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Numerical modeling and validation of squeezed-film damping in vacuum-packaged industrial MEMS

Published:2017-06-08 Issue:7 Volume:27 Page:075016
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Syed Wajih U,Brimmo Ayoola,Waheed Owais,Bojesomo Alabi,Ali Mohamed Hassan,Ocak Ilker,Chengliang Sun,Chatterjee Aveek,Elfadel Ibrahim (Abe) M

Funder

Mubadala Company, Abu Dhabi, UAE

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/27/i=7/a=075016/pdf

Reference42 articles.

1. Squeeze film air damping in MEMS

2. Analytical solution of the modified Reynolds equation for squeeze film damping in perforated MEMS structures

3. A comparative study of analytical squeeze film damping models in rigid rectangular perforated MEMS structures with experimental results

4. A semi-analytical model for squeeze-film damping including rarefaction in a MEMS torsion mirror with complex geometry

5. Comparative numerical study of FEM methods solving gas damping in perforated MEMS devices

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effects of air damping on quality factors of different probes in tapping mode atomic force microscopy;Chinese Physics B;2024-09-01

2. Air Damping Effects on Perforated RF MEMS Switches;2022 3rd International Conference on Electronics and Sustainable Communication Systems (ICESC);2022-08-17

3. Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope;Micromachines;2020-09-17

4. Sensor Design Migration: The Case of a VRG;IEEE Sensors Journal;2019-11-15

5. Modeling and experimental characterization of squeeze film effects in nonlinear capacitive circular microplates;Mechanical Systems and Signal Processing;2019-07

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3