Design and analysis of photonic MEMS based micro ring resonators for pressure sensing application
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Link
https://iopscience.iop.org/article/10.1088/1361-6439/ac2bb1/pdf
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4. Low-noise MEMS vibration sensor for geophysical applications;Bernstein;J. Microelectromech. Syst.,1999
5. Recent advances in biosensor technology for potential applications—an overview;Vigneshvar;Front. Bioeng. Biotechnol.,2016
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