Using sugar as a mask material (SAAMM) in micro-nano fabrication: a high-performance, green and simple method-Reference-Cited by-同舟云学术

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Using sugar as a mask material (SAAMM) in micro-nano fabrication: a high-performance, green and simple method

Published:2021-07-21 Issue:9 Volume:31 Page:095001
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Zhang Cheng^ORCID,Guo Xingqi^ORCID,Yang Xing^ORCID,Luo Kun,Zhu Huamin,Leng Huiwen

Funder

National Natural Science Foundation of China

basic scientific research project of Wenzhou

Natural Science Foundation of Zhejiang Province

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1088/1361-6439/ac12a2/pdf

Reference37 articles.

1. Fabrication of glass-based microfluidic devices with dry film photoresists as pattern transfer masks for wet etching;Zhang;RSC Adv.,2015

2. Lateral epitaxial heterojunctions in single nanowires fabricated by masked cation exchange;Dogan;Nat. Commun.,2018

3. Rapid stencil mask fabrication enabled one-step polymer-free graphene patterning and direct transfer for flexible graphene devices;Yong;Sci. Rep.,2016

4. SU8 etch mask for patterning PDMS and its application to flexible fluidic microactuators;Gorissen;Microsyst. Nanoeng.,2016

5. Modification of block copolymer lithography masks by O2/Ar plasma treatment: insights from lift-off experiments, nanopore etching and free membranes;Brassat;Nanotechnology,2019

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Novel Three-Dimensional and Biocompatible Lift-Off Method for Selective Metallization of a Scleral Contact Lens Electrode for Biopotential Detection;Frontiers in Medical Technology;2022-06-10

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