Fabrication of glass-based microfluidic devices with dry film photoresists as pattern transfer masks for wet etching-Reference-Cited by-同舟云学术

Fabrication of glass-based microfluidic devices with dry film photoresists as pattern transfer masks for wet etching

Published:2015 Issue:8 Volume:5 Page:5638-5646
ISSN:2046-2069
Container-title:RSC Advances
language:en
Short-container-title:RSC Adv.

Author:

Zhang Lei¹²³⁴,Wang Wei¹²³⁴,Ju Xiao-Jie¹²³⁴,Xie Rui¹²³⁴,Liu Zhuang¹²³⁴,Chu Liang-Yin¹²³⁴⁵

Affiliation:

1. School of Chemical Engineering

2. Sichuan University

3. Chengdu

4. China

5. State Key Laboratory of Polymer Materials Engineering

Abstract

A simple, cheap and rapid method is developed to fabricate glass microfluidic devices with dry film photoresist as pattern transfer masks for wet etching, which provides an efficient approach for mass-production of glass microchips.

Funder

National Natural Science Foundation of China

Publisher

Royal Society of Chemistry (RSC)

Subject

General Chemical Engineering,General Chemistry

Link

http://pubs.rsc.org/en/content/articlepdf/2015/RA/C4RA15907A

Reference56 articles.

1. The origins and the future of microfluidics

2. Microfluidic Large-Scale Integration

3. Droplet microfluidics

4. Microfluidic devices fabricated in Poly(dimethylsiloxane) for biological studies

5. Microfluidics-based systems biology

Cited by 55 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fabrication of microchannels and through-holes in Borofloat glass using Cr thin film with positive photoresist as the masking layer through wet etching;Materials Today Communications;2024-12

2. Innovative microfluidic thread electroanalytical device with automated injector: A simple, green and upgraded analytical platform for the fast and sensitive analysis of ferrous ions;Microchemical Journal;2024-09

3. High-throughput microfluidic production of carbon capture microcapsules: fundamentals, applications, and perspectives;International Journal of Extreme Manufacturing;2024-04-04

4. Recent developments and future perspectives of microfluidics and smart technologies in wearable devices;Lab on a Chip;2024

5. Improving the performance and versatility of microfluidic thread electroanalytical devices by automated injection with electronic pipettes: a new and powerful 3D-printed analytical platform;Microchimica Acta;2023-11-06