MEMS transducers low-cost fabrication using SU-8 in a sacrificial layer-free process
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0960-1317/27/i=4/a=045002/pdf
Reference27 articles.
1. SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography
2. SU-8 as a structural material for labs-on-chips and microelectromechanical systems
3. Thin film free-standing PEDOT:PSS/SU8 bilayer microactuators
4. Magnetic, Mechanical, and Optical Characterization of a Magnetic Nanoparticle-Embedded Polymer for Microactuation
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