A single mask process for the realization of fully-isolated, dual-height MEMS metallic structures separated by narrow gaps
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Link
http://iopscience.iop.org/article/10.1088/1361-6439/aaa0fd/pdf
Reference11 articles.
1. A novel large displacement electrostatic actuator: pre-stress comb-drive actuator
2. A novel sizing environment (DSP-1) dealing with semi-numerical models applied to the optimization of a bi-stable out-of-plane magnetic micro-switch
3. Hollow microcoils made possible with external support structures manufactured with a two-solvent process
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