Fabrication of ultra-high-aspect-ratio nano-walls and nano-structures on silicon substrates
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Link
https://iopscience.iop.org/article/10.1088/1361-6439/abbcb9/pdf
Reference27 articles.
1. High aspect ratio silicon etch: A review
2. Molecular dynamics simulation of Si and SiO2 reactive ion etching by fluorine-rich ion species
3. Bactericidal activity of black silicon
4. High aspect ratio nanoneedle probes with an integrated electrode at the tip apex
5. Enhanced metal assisted etching method for high aspect ratio microstructures: Applications in silicon micropillar array solar cells
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