Comparative study of soft thermal printing and lamination of dry thick photoresist films for the uniform fabrication of polymer MOEMS on small-sized samples-Reference-Cited by-同舟云学术

Comparative study of soft thermal printing and lamination of dry thick photoresist films for the uniform fabrication of polymer MOEMS on small-sized samples

Published:2017-04-12 Issue:5 Volume:27 Page:055018
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Abada S,Salvi L,Courson R,Daran E,Reig B,Doucet J B,Camps T,Bardinal V

Funder

RENATECH

The French National Research Agency (ANR)

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/27/i=5/a=055018/pdf

Reference27 articles.

1. Polymer tunable microlens arrays suitable for VCSEL beam control

2. Fabrication of polymer-based optical microsystem arrays suited for the active focusing of vertical laser diodes

3. SU-8: a low-cost negative resist for MEMS

4. High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS

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