Author:
Raineri V,Galvagno G,Rimini E,Capizzi S,Ferla A La,Carnera A,Feria G
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
14 articles.
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5. Influence of channeling effects on ion distribution and damage profiles during high energy ion implantation in Si;Mikrochimica Acta;1994-12