A comparison of laser- and furnace-annealed polysilicon structure-Reference-Cited by-同舟云学术

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A comparison of laser- and furnace-annealed polysilicon structure

Published:2001-12-19 Issue:1 Volume:17 Page:47-54
ISSN:0268-1242
Container-title:Semiconductor Science and Technology
language:
Short-container-title:Semicond. Sci. Technol.

Author:

Parr Andrea A,Gill Kelly,Gardiner Derek J,Hoyland James D,Sands David,Brunson Kevin,Carline Roger T

Publisher

IOP Publishing

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference30 articles.

1. Raman spectroscopy and spreading resistance analysis of phosphorus implanted and annealed silicon

2. Strain of laser annealed silicon surfaces

3. Comparison of low temperature polysilicon crystal growth on low cost substrates

4. Lateral growth control in excimer laser crystallized polysilicon

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