Author:
Houssa M,Gendt S De,Bokx P de,Mertens P W,Heyns M M
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
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1. Radiation Damage in Silicon MOS Devices;Radiation Effects in Advanced Semiconductor Materials and Devices;2002
2. Analysis of trace metals in thin silicon nitride films by total-reflection X-ray fluorescence;Spectrochimica Acta Part B: Atomic Spectroscopy;2001-11