n-type conductivity in c-BN films deposited by microwave plasma-assisted chemical vapour deposition
Author:
Publisher
IOP Publishing
Subject
Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0268-1242/10/i=11/a=014/pdf
Reference25 articles.
1. Current Issues and Problems in the Chemical Vapor Deposition of Diamond
2. Formation of cubic boron nitride films by arc‐like plasma‐enhanced ion plating method
3. Preparation of Cubic Boron Nitride Films by RF Sputtering
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