A white-light interferometer as a gauge to measure the thickness of thin film: a practical extension of the phase method and correlogram summation
Author:
Publisher
IOP Publishing
Subject
Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/2040-8986/17/i=12/a=125616/pdf
Reference21 articles.
1. White-Light Interferometric Thickness Gauge
2. Interference Microscopy for Surface Structure Analysis
3. Interferometry for ellipso-height-topometry
4. Interference Microscopy for Surface Structure Analysis
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1. White Light Interference Signal Demodulation Algorithm Based on Correlation;SPECTROSC SPECT ANAL;2023
2. Fast template matching method in white-light scanning interferometry for 3D micro-profile measurement;Applied Optics;2020-01-28
3. Precision of evaluation methods in white light interferometry. Correlogram correlation method;Measurement;2018-07
4. Noise robustness of interferometric surface topography evaluation methods. Correlogram correlation;Surface Topography: Metrology and Properties;2017-12-13
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