Optical proximity correction using a multilayer perceptron neural network
Author:
Publisher
IOP Publishing
Subject
Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/2040-8986/15/i=7/a=075708/pdf
Reference32 articles.
1. Automated optical proximity correction: a rules-based approach
2. Fast optical proximity correction: analytical method
3. Binary and phase shifting mask design for optical lithography
4. Fast proximity correction with zone sampling
5. Mask and source optimization for lithographic imaging systems
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