Similarities in the electrical conduction processes in hydrogenated amorphous silicon oxynitride and silicon nitride
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics,General Materials Science
Link
http://stacks.iop.org/0953-8984/15/i=13/a=305/pdf
Reference21 articles.
1. Parasitic Channel Induced by Spin‐On‐Glass in a Double‐Level Metallization Complimentary Metal Oxide Semiconductor Process: Its Formation and Method of Suppression
2. Reactive pulsed laser deposition of high-ksilicon dioxide and silicon oxynitride thin films for gate-dielectric applications
3. Highly reliable thin nitrided SiO2 films formed by rapid thermal processing in an N2O ambient
4. Visible electroluminescence in hydrogenated amorphous silicon oxynitride
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Fully Inkjet Printed RF Inductors and Capacitors Using Polymer Dielectric and Silver Conductive Ink With Through Vias;IEEE Transactions on Electron Devices;2015-03
2. Kelvin force microscopy characterization of charging effect in thin a-SiOxNy:H layers deposited in pulsed plasma enhanced chemical vapor deposition process by tuning the Silicon-environment;Journal of Applied Physics;2013-05-28
3. Annealing Effects on Silicon Oxynitride Layer Synthesized by N Plasma Immersion Ion Implantation;IEEE Transactions on Plasma Science;2006-08
4. Structural Defects in Amorphous Silicon Oxynitride and Silicon Nitride;Defect and Diffusion Forum;2003-08
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3