Electron-induced interaction of selected hydrocarbons with TiO2surfaces: the relevance to extreme ultraviolet lithography
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics,General Materials Science
Link
http://stacks.iop.org/0953-8984/22/i=8/a=084004/pdf
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1. Properties of ultrathin films appropriate for optics capping layers exposed to high energy photon irradiation
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