Bonding structure and properties of ion enhanced reactive magnetron sputtered silicon carbonitride films
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics,General Materials Science
Reference20 articles.
1. A covalent micro/nano-composite resistant to high-temperature oxidation
2. Influence of temperature on the properties of films prepared by plasma-enhanced chemical vapour deposition
3. Ion-assisted deposition of CN and SiCN films
4. Silicon carbonitride: a rival to cubic boron nitride
5. Structural characterization of amorphous SiCxNy chemical vapor deposited coatings
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