Silicon oxynitride as a tunable optical material
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics,General Materials Science
Link
http://stacks.iop.org/0953-8984/6/i=26/a=018/pdf
Reference22 articles.
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4. The amorphous SiOx: Hy thin film system. III. Structure and bonding
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4. Critical evaluation of the state of the art of the analysis of light elements in thin films demonstrated using the examples of SiOXNY and AlOXNY films (IUPAC Technical Report);Pure and Applied Chemistry;2004-01-01
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