A dual-side fabrication method for silicon plate springs with high out-of-plane stiffness-Reference-Cited by-同舟云学术

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A dual-side fabrication method for silicon plate springs with high out-of-plane stiffness

Published:2007-07-01 Issue:7 Volume:17 Page:S197-S203
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Paalvast S L,Zeijl H W van,Su J,Sarro P M,Eijk J van

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Fabrication, characterization, and analysis of a DRIE CMOS-MEMS gyroscope

2. Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications

3. Extended range tuning elements for a microelectromechanical systems external cavity laser

4. Large-force electrothermal linear micromotors

5. High-bandwidth high-accuracy rotary microactuators for magnetic hard disk drive tracking servos

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1. Integrated Piezoresistive Force and Position Detection Sensors for Micro-Handling Applications;Journal of Microelectromechanical Systems;2013-12

2. From 2-Dimensional Lithography To 3-Dimensional Structures;ECS Transactions;2010-11-23

3. From 2D Lithography to 3D Patterning;ECS Transactions;2010-10-01

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