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Improved manufacturability and characterization of a corrugated Parylene diaphragm pressure transducer

  • Published:2006-06-16 Issue:8 Volume:16 Page:1468-1474
  • ISSN:0960-1317
  • Container-title:Journal of Micromechanics and Microengineering
  • language:
  • Short-container-title:J. Micromech. Microeng.

Author:

Luharuka Rajesh,Noh Hongseok (Moses),Kim Sang Kyung,Mao Hua,Wong Lid,Hesketh Peter J

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Stress, sensitivity and frequency analysis of the corrugated diaphragm for different corrugation structures;SMART STRUCT SYST;2021

2. Large-Displacement Micro Pneumatic Actuators Based on Corrugated Parylene Film;2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII);2019-06

3. Ni-based microvalves for flow modulation: Toward active combustion control;Sensors and Actuators A: Physical;2012-12

4. Parylene C-on-photoresist (POP): a low temperature spacer scheme for polymer/metal nanowire fabrication;Journal of Micromechanics and Microengineering;2011-04-21

5. A flexible tri-axis contact force sensor for tubular medical device applications;Journal of Micromechanics and Microengineering;2011-02-03
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