A Model for the Chemical Vapor Deposition of Poly(para-xylylene) (Parylene) Thin Films
Author:
Affiliation:
1. Center for Integrated Electronics and Electronics Manufacturing, Rensselaer Polytechnic Institute, Troy, New York 12180
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm010454a
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1. Some remarks on the CH2[graphic omitted]CH2 molecule
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4. A New, General Synthetic Method for the Preparation of Linear Poly-p-xylylenes
5. A Model for the Vapor Deposition Polymerization of p-Xylylene
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