Design and characterization of a CMOS MEMS capacitive resonant sensor array
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference39 articles.
1. An integrated CMOS micromechanical resonator high-Q oscillator
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4. The resonant gate transistor
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1. A Monolithic CMOS-MEMS Reconfigurable/Tunable Capacitive Accelerometer with Integrated Sensing Circuits;Frontiers in Mechanical Engineering;2022-05-12
2. CMOS-MEMS Oscillator Architecture and Phase Noise: A Mini-Review;Frontiers in Mechanical Engineering;2022-05-03
3. Standard CMOS Integrated Ultra-Compact Micromechanical Oscillating Active Pixel Arrays;2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS);2021-01-25
4. CMOS-MEMS Resonators and Oscillators : A Review;Sensors and Materials;2018
5. Automated Resonance Matching for CMOS MEMS Micro-Resonators;IEEE Sensors Journal;2016-11
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