Absorber embedded x-ray mask for high aspect ratio polymeric optical components
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference13 articles.
1. Deep X-ray lithography for the production of three-dimensional microstructures from metals, polymers and ceramics
2. Polymeric optical MEMS
3. Polymer waveguide devices with passive pigtailing: an application of LIGA technology
4. Passive Alignment Method of Polymer PLC Devices by Using a Hot Embossing Technique
5. Plastic micro-optical components with the LIGA technology
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. A MEMS-BASED MICRO-BIOPSY ACTUATOR FOR CAPSULAR ENDOSCOPE USING LIGA PROCESS;IFAC Proceedings Volumes;2006
2. Integration of a polymeric planar-lightwave-circuit chip based on a polymer microsystem and a UV imprinting technique;Journal of Micromechanics and Microengineering;2005-04-22
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