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Experimental study of heat-treated thin film Ti/Pt heater and temperature sensor properties on a Si microfluidic platform

  • Published:2011-01-27 Issue:2 Volume:21 Page:025025
  • ISSN:0960-1317
  • Container-title:Journal of Micromechanics and Microengineering
  • language:
  • Short-container-title:J. Micromech. Microeng.

Author:

Resnik D,Vrtačnik D,Možek M,Pečar B,Amon S

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Cited by 38 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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3. Influence of annealing in deposited Ti-Pt thin films sensing elements for quartz crystals microbalances;2023 IEEE 10th International Workshop on Metrology for AeroSpace (MetroAeroSpace);2023-06-19

4. Enhancing the temperature coefficient of resistance of Pt thin film resistance-temperature-detector by short-time annealing;Ceramics International;2023-04

5. Measurement errors introduced by plane heater in steady-state thermal conductivity measurement;2023 IEEE 6th Information Technology,Networking,Electronic and Automation Control Conference (ITNEC);2023-02-24
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