Influence of annealing in deposited Ti-Pt thin films sensing elements for quartz crystals microbalances
Author:
Affiliation:
1. Politecnico di Milano,Department of Mechanical Engineering,Milan,Italy
2. Institute of Atmospheric pollution Research CNR,Rome,Italy
3. National Institute of Astrophysics INAF-IAPS,Rome,Italy
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10189920/10189924/10189942.pdf?arnumber=10189942
Reference15 articles.
1. Influence of thermal annealing on the resistivity of titanium/platinum thin films
2. Experimental study of heat-treated thin film Ti/Pt heater and temperature sensor properties on a Si microfluidic platform
3. Determination of diffusion in polycrystalline platinum thin films
4. Electrical performance of Ti/Pt thin films on glass-ceramic substrates after high temperature loading
5. The stability of Pt heater and temperature sensing elements for silicon integrated tin oxide gas sensors
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