Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Cited by
8 articles.
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1. Integrated Photonic Optomechanical Atomic Force Microscopy Probes Batch Fabricated Using Deep UV Photolithography;Journal of Microelectromechanical Systems;2023-06
2. Anisotropic etching of silicon in solutions containing tensioactive compounds;SPIE Proceedings;2016-12-22
3. Wet Etching of Silicon;Handbook of Silicon Based MEMS Materials and Technologies;2015
4. Wet Etching of Silicon;Handbook of Silicon Based MEMS Materials and Technologies;2010
5. Wet etching of silicon;Handbook of Silicon Based MEMS Materials and Technologies;2010