Design and fabrication process for electrostatic side-drive motors-Reference-Cited by-同舟云学术

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Design and fabrication process for electrostatic side-drive motors

Published:1995-03-01 Issue:1 Volume:5 Page:11-17
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Frangoul A G,Sundaram K B

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. A design overview of an eccentric-motion electrostatic microactuator (the wobble motor)

2. Integrated fabrication of polysilicon mechanisms

3. Silicon-processed overhanging microgripper

4. IC-processed electrostatic synchronous micromotors

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