1. CMOS magnetic sensor arrays;Clark;IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, U.S.A.,1988
2. IC-processed electrostatic micromotors;Fan;IEEE Int. Electron Devices Meet., San Francisco, CA, U.S.A.,1988
3. Electrostatic actuators for micromechatronics;Fujita;Proc. IEEE Micro Robots and Teleoperators Workshop, Hyannis, MA, U.S.A.,1987
4. Micromachine magic;Gannon;Pop. Sci.,1989