Design of linear-motion microactuators using piezoelectric thin films-Reference-Cited by-同舟云学术

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Design of linear-motion microactuators using piezoelectric thin films

Published:1991-12-01 Issue:4 Volume:1 Page:247-252
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Robbins W P,Polla D L,Tamagawa T,Glumac D E,Tjhen W

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference9 articles.

1. A linear piezoelectric stepper motor with submicrometer step size and centimeter travel range

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