Author:
Gardner Julian W.,Varadan Vijay K.,Awadelkarim Osama O.
Reference12 articles.
1. ”Microfabrication of submicron nozzles in silicon nitride,”;Farooqui;J. Microelectromech. Syst.,1992
2. Hirano , T. Furuhata , T. Gabriel , K. J. Fujita , H. 1991 Technical Digest of 6th Int. Conf. Solid-State Sensors and Actuators, San Francisco, USA 63 66
3. ”Design, fabrication, and operation of submicron gap comb-drive microactuators,”;Hirano;J. Microelectromech. Syst.,1992