Design and characterization of AlN-based in-plane microplate resonators-Reference-Cited by-同舟云学术

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Design and characterization of AlN-based in-plane microplate resonators

Published:2013-06-24 Issue:7 Volume:23 Page:074003
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Ruiz-Díez V,Manzaneque T,Hernando-García J,Ababneh A,Kucera M,Schmid U,Seidel H,Sánchez-Rojas J L

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/23/i=7/a=074003/pdf

Reference19 articles.

1. Physical Sensors for Liquid Properties

2. Analysis and experimental verification of a metallic suspended plate resonator for viscosity sensing

3. Micromachined thin film plate acoustic resonators utilizing the lowest order symmetric lamb wave mode

4. Super-high-frequency two-port AlN contour-mode resonators for RF applications

5. High-Q aluminum nitride Lamb wave resonators with biconvex edges

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