High-Q aluminum nitride Lamb wave resonators with biconvex edges
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3643153
Reference18 articles.
1. Lateral-field-excited thin-film Lamb wave resonator
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4. Super-high-frequency two-port AlN contour-mode resonators for RF applications
5. 1.05-GHz CMOS oscillator based on lateral- field-excited piezoelectric AlN contour- mode MEMS resonators
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