Silicon micro-masonry using elastomeric stamps for three-dimensional microfabrication-Reference-Cited by-同舟云学术

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Silicon micro-masonry using elastomeric stamps for three-dimensional microfabrication

Published:2012-04-16 Issue:5 Volume:22 Page:055018
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Keum Hohyun,Carlson Andrew,Ning Hailong,Mihi Agustin,Eisenhaure Jeffrey D,Braun Paul V,Rogers John A,Kim Seok

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference20 articles.

1. Fundamentals of Microfabrication

2. GaAs-compatible surface-micromachined RF MEMS switches

3. Performance of low-loss RF MEMS capacitive switches

4. Photonic microharp chemical sensors

5. A monolithic three-axis micro-g micromachined silicon capacitive accelerometer

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