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GaAs-compatible surface-micromachined RF MEMS switches

  • Published:1999 Issue:3 Volume:35 Page:224
  • ISSN:0013-5194
  • Container-title:Electronics Letters
  • language:en
  • Short-container-title:Electron. Lett.

Author:

Hyman D.,Schmitz A.,Warneke B.,Hsu T.Y.,Lam J.,Brown J.,Schaffner J.,Walston A.,Loo R.Y.,Tangonan G.L.,Mehregany M.,Lee J.

Publisher

Institution of Engineering and Technology (IET)

Subject

Electrical and Electronic Engineering

Cited by 35 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design and Simulation of RF MEMS Switch using Uniform Serpentine Flexure Four Meander Type Beam;2022 8th International Conference on Signal Processing and Communication (ICSC);2022-12-01

2. Design and Fabrication of Dual Substrate RF MEMS Switch with Low Actuation Voltage;2022 IEEE 5th International Conference on Electronics Technology (ICET);2022-05-13

3. Analytical Approach in the Development of RF MEMS Switches;Electronics;2018-12-10

4. Material selection methodology for radio frequency (RF) microelectromechanical (MEMS) capacitive shunt switch;Microsystem Technologies;2018-02-09

5. Optimization of structures of DC RF MEMS series switches for low actuation;Microsystem Technologies;2016-07-14
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