10.1088/0960-1317/7/4/010
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference26 articles.
1. An Atomic Force Microscopy Study on the Roughness of Silicon Wafers Correlated with Direct Wafer Bonding
2. Anisotropic Etching of Silicon
3. Anisotropic etching of silicon at high pressure
4. Surface Morphology of p‐Type (100) Silicon Etched in Aqueous Alkaline Solution
5. Inhibition of pyramid formation in the etching of Si p(100) in aqueous potassium hydroxide-isopropanol
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