Rapid prototyping of polymer-based MEMS devices using UV YAG laser
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference20 articles.
1. Laser processes for MEMS manufacture
2. Silicon as a mechanical material
3. Rapid prototyping of micromechanical devices using a Q-switched Nd:YAG laser with optional frequency doubling
4. Laser Machining by short and ultrashort pulses, state of the art and new opportunities in the age of the photons
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3. Laser Micromachining for Transparent Materials;Reference Module in Materials Science and Materials Engineering;2017
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