Feasibility study of self-assembly mechanism for variable optical attenuator-Reference-Cited by-同舟云学术

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Feasibility study of self-assembly mechanism for variable optical attenuator

Published:2004-10-09 Issue:1 Volume:15 Page:55-62
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Lee Chengkuo,Lai Yen-Jyh,Wu Chia-Yu,Yeh J Andrew,Huang Ruey-Shing

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference26 articles.

1. IC-processed electrostatic micromotors

2. Electrostatic-comb drive of lateral polysilicon resonators

3. Microfabricated hinges

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4. Lifting angle of polyimide self-assembly surface-micromachined structure;Journal of Micro/Nanolithography, MEMS, and MOEMS;2010-04-01

5. In-plane rotary comb-drive actuator for a variable optical attenuator;Journal of Micro/Nanolithography, MEMS, and MOEMS;2008-10-01

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