Controlling adhesion between multi-asperity contacting surfaces in MEMS devices by local heating-Reference-Cited by-同舟云学术

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Controlling adhesion between multi-asperity contacting surfaces in MEMS devices by local heating

Published:2016-08-04 Issue:9 Volume:26 Page:095020
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Gkouzou A,Kokorian J,Janssen G C A M,van Spengen W M

Funder

Stichting voor Fundamenteel Onderzoek der Materie

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/26/i=9/a=095020/pdf

Reference32 articles.

1. Micro Electromechanical Systems (MEMS) Based Microfluidic Devices for Biomedical Applications

2. MEMS testing and applications in automotive and aerospace industries

3. MEMS for wireless communications: from RF-MEMS components to RF-MEMS-SiP

4. Critical Review: Adhesion in surface micromechanical structures

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1. Modeling Density Waves and Circulations in Vertical Cross-Section in Adhesive Contacts;Computation;2024-05-20

2. Study on Adhesion Force of Graphene under Cylinder–Plane Contact;Lubricants;2023-03-10

3. Three Regimes in the Tribo‐Oxidation of High Purity Copper at Temperatures of up to 150 °C;Advanced Engineering Materials;2022-07-12

4. On stickiness of multiscale randomly rough surfaces;The Journal of Adhesion;2019-11-04

5. Friction and dynamically dissipated energy dependence on temperature in polycrystalline silicon MEMS devices;Microsystem Technologies;2017-10-20

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