Author:
French P J,Wolffenbuttel R F
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Cited by
12 articles.
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1. Robust micromachining of compliant mechanisms using silicides;Journal of Micromechanics and Microengineering;2012-12-13
2. Silicon and Related Materials;Comprehensive Microsystems;2008
3. Micromachining Technology;MEMS: A Practical Guide to Design, Analysis, and Applications;2006
4. Micromachining Technology;MEMS;2006
5. Borophosphosilicate glass component analysis using secondary neutral mass spectrometry;Semiconductor Physics, Quantum Electronics and Optoelectronics;2002-03-05