Squeeze-film air damping of a torsion mirror at a finite tilting angle-Reference-Cited by-同舟云学术

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Squeeze-film air damping of a torsion mirror at a finite tilting angle

Published:2006-09-15 Issue:11 Volume:16 Page:2330-2335
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Bao Minhang,Sun Yuanchen,Zhou Jia,Huang Yiping

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. Pull-in study of an electrostatic torsion microactuator

2. A study of the static characteristics of a torsional micromirror

3. Isothermal squeeze films

4. Squeeze Film Dampers: Amplitude Effects at Low Squeeze Numbers

Cited by 35 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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4. Correlated Theory of Cross-Axis Interference of MEMS Devices Based on Parallel Plate and Squeeze Film Air Damping Induced Suppression;IEEE Sensors Journal;2022-04-01

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