Refractive lenses in silicon micromachining by reflow of amorphous fluorocarbon polymer-Reference-Cited by-同舟云学术

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Refractive lenses in silicon micromachining by reflow of amorphous fluorocarbon polymer

Published:2006-05-09 Issue:6 Volume:16 Page:S88-S95
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Hedsten Karin,Karlén David,Bengtsson Jörgen,Enoksson Peter

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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