A passive gap-spacing control scheme for in-plane nano-precision sensing and positioning applications-Reference-Cited by-同舟云学术

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A passive gap-spacing control scheme for in-plane nano-precision sensing and positioning applications

Published:2008-07 Issue: Volume:145-146 Page:214-223
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Ramakrishnan Narayanan,Chu Patrick B.,Johns Earl C.,Zhao Yongjun,Yan Xiaoping

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference25 articles.

1. Highly parallel data storage system based on scanning probe arrays;Lutwyche;Appl. Phys. Lett.,2000

2. A high-performance dipole surface drive for large travel and force;Hoen,2003

3. Static friction coefficient model for metallic rough surfaces;Chang;ASME J. Tribol.,1998

4. A semi-analytical solution of the sliding inception of a spherical contact;Kogut;ASME J. Tribol.,2003

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1. Performance-optimized design of electromagnetic micro-actuator for Probe recording storage device;Microsystem Technologies;2014-04-03

2. Scanning Probe Alloying Nanolithography;Scanning Probe Microscopy in Nanoscience and Nanotechnology;2009-12-04

3. Nanoprecision MEMS Capacitive Sensor for Linear and Rotational Positioning;Journal of Microelectromechanical Systems;2009-06

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