Deep wet etching of fused silica glass for hollow capillary optical leaky waveguides in microfluidic devices-Reference-Cited by-同舟云学术

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Deep wet etching of fused silica glass for hollow capillary optical leaky waveguides in microfluidic devices

Published:2001-04-20 Issue:3 Volume:11 Page:257-262
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Grosse Axel,Grewe Matthias,Fouckhardt Henning

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference20 articles.

1. Miniaturized total chemical analysis systems: A novel concept for chemical sensing

2. Hot embossing as a method for the fabrication of polymer high aspect ratio structures

3. Fabrication of Quartz Microcapillary Electrophoresis Chips Using Plasma Etching

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1. Effect of a Photolithography Polymer Mask’s Dynamic Viscoelasticity on Microchannel Cross-Sectional Shapes of Glass Processed by Micropowder Blasting;Micromachines;2024-02-09

2. Low‐temperature bonding of glasses: The role of plasma‐engrafted surface amino groups;Journal of the American Ceramic Society;2024-01-18

3. Etching conditions effect on anisotropic properties of sapphire;Journal of Crystal Growth;2023-11

4. Etching of micro-channels in fused quartz for novel device applications;Materials Today: Proceedings;2023-08

5. Achieving 1 Million Quality Factor in Fused Silica Planar Frame Resonator (PFR);IEEE Transactions on Components, Packaging and Manufacturing Technology;2023-05

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